عنوان
پدید آورنده
موضوع
رده
TA 2020 .H37 1990
TA
2020
.
H37
1990
کتابخانه
محل استقرار
لاتين
edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood
Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions
Park Ridge, N.J., U.S.A.
Noyes Publications
1990
xxiii, 523 p. : ill. ; 25 cm
مرجع به حساب نمي آيد
Includes bibliographical references
Plasma engineering
Semiconductors - Etching
Plasma etching
TA
2020
.
H37
1990
عنوان
Cuomo, J. J.
Rossnagel, Stephen M.
Westwood, William D.(William Dickson)
1937-
