Fundamentals of microfabrication and nanotechnology.dollar5Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology /
نام عام مواد
[Book]
نام نخستين پديدآور
Marc J. Madou
وضعیت ویراست
وضعيت ويراست
3rd ed
وضعیت نشر و پخش و غیره
محل نشرو پخش و غیره
Boca Raton, FL :
نام ناشر، پخش کننده و غيره
CRC Press,
تاریخ نشرو بخش و غیره
c2012
مشخصات ظاهری
نام خاص و کميت اثر
3 v. :
ساير جزييات
ill. (some col.) ;
ابعاد
29 cm
یادداشتهای مربوط به کتابنامه ، واژه نامه و نمایه های داخل اثر
متن يادداشت
Includes bibliographical references and index
یادداشتهای مربوط به مندرجات
متن يادداشت
V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications
بدون عنوان
0
یادداشتهای مربوط به خلاصه یا چکیده
متن يادداشت
"In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"--
متن يادداشت
"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"--
عنوان اصلی به زبان دیگر
عنوان اصلي به زبان ديگر
Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
موضوع (اسم عام یاعبارت اسمی عام)
موضوع مستند نشده
Microelectromechanical systems
موضوع مستند نشده
Microfluidics
موضوع مستند نشده
Nanoelectromechanical systems
موضوع مستند نشده
Solid state physics
رده بندی کنگره
شماره رده
TK7875
نشانه اثر
.
M33
2012
نام شخص به منزله سر شناسه - (مسئولیت معنوی درجه اول )