عنوان

Nanolithography

شابک

9780857098757

شابک اشتباه

9780857095008

شماره

b401931

عنوان اصلي

Nanolithography

نام عام مواد

[Book]

ساير اطلاعات عنواني

the art of fabricating nanoelectronic and nanophotonic devices and systems /

نام نخستين پديدآور

[edited by] Martin Feldman.

نام خاص و کميت اثر

1 online resource :

ساير جزييات

illustrations.

عنوان فروست

Woodhead Publishing series in electronic and optical materials ;

مشخصه جلد

number 42

متن يادداشت

Includes bibliographical references and index.

متن يادداشت

Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics. The goal of this book is to give enough background information to enable researchers to understand and appreciate new developments in nanolithography, and to go on to make advances of his/her own. Topics include: current state of the art in alternative nanolithography technologies in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions; lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography; emerging applications of nanolithography in nanoelectronics, nanophotonics and microfluidics. --

موضوع مستند نشده

Nanoelectronics.

موضوع مستند نشده

Nanoimprint lithography.

موضوع مستند نشده

Nanolithography.

موضوع مستند نشده

Nanophotonics.

مستند نام اشخاص تاييد نشده

Feldman, Martin

مستند نام تنالگان تاييد نشده

Books24x7, Inc.

تاريخ عمليات

20151201155900.0

قواعد فهرست نويسي ( بخش توصيفي )

pn

نام الکترونيکي

نوع ماده

[Book]

تكميل شده

Y