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عنوان
Modelling of microfabrication systems
پدید آورنده
/ Raja Nassar , Weizhong Dai
موضوع
Microelectronics ــ Mathematical models.,Integrated circuits ــ Mathematical models.,Microelectromechanical systems ــ Mathematical models.
رده
TK
7836
.
N35
2003
کتابخانه
Library of Campus2 Colleges of Engineering of Tehran University
محل استقرار
استان:
Tehran
ـ شهر:
Tehran
تماس با کتابخانه :
88225387
-
021
INTERNATIONAL STANDARD BOOK NUMBER
Qualification
(alk. paper)
(Number (ISBN
3540002529
NATIONAL BIBLIOGRAPHY NUMBER
Country Code
IR
Number
43125
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
انگلیسی
COUNTRY OF PUBLICATION OR PRODUCTlON
Country of publication
IR
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Modelling of microfabrication systems
General Material Designation
[Book]
First Statement of Responsibility
/ Raja Nassar , Weizhong Dai
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Berlin ;
Name of Publisher, Distributor, etc.
: Springer,
Date of Publication, Distribution, etc.
, c2003.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
x, 269p.
Other Physical Details
: ill.
Dimensions
; 24 cm
SERIES
Series Title
Microtechnology and MEMS, 1615-8326
GENERAL NOTES
Text of Note
English
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references (p. [249]-261) and index.
TOPICAL NAME USED AS SUBJECT
Microelectronics ــ Mathematical models.
Integrated circuits ــ Mathematical models.
Microelectromechanical systems ــ Mathematical models.
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7836
Book number
.
N35
2003
PERSONAL NAME - PRIMARY RESPONSIBILITY
Nassar, Raja.
PERSONAL NAME - SECONDARY RESPONSIBILITY
Dai, Weizhong., author
ORIGINATING SOURCE
Country
Iran
Agency
University of Tehran. Library of Technical Camp 2
Old cataloging
p
BL
1
Y
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