NATIONAL BIBLIOGRAPHY NUMBER
Number
oldebook20382
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
eng
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Microfabrication and nanomanufacturing
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boca Raton, FL :
Name of Publisher, Distributor, etc.
: Francis,&CRC/Taylor
Date of Publication, Distribution, etc.
, 2006.
NOTES PERTAINING TO PUBLICATION, DISTRIBUTION, ETC.
Text of Note
Print
TOPICAL NAME USED AS SUBJECT
Microelectronics ; Integrated circuits ; Design and construction ; Microelectromechanical systems ; Design and construction ;
PERSONAL NAME - PRIMARY RESPONSIBILITY
Jackson, Mark J ;
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