عنوان
پدید آورنده
موضوع
رده
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
0323241433
(Number (ISBN
9780323241434
NATIONAL BIBLIOGRAPHY NUMBER
Number
b426207
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
New approaches to image processing based failure analysis of nano-scale ULSI devices /
General Material Designation
[Book]
First Statement of Responsibility
Zeev Zalevsky, Pavel Livshits, Eran Gur
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
101 pages :
Other Physical Details
illustrations ;
Dimensions
23 cm
SERIES
Series Title
Micro and Nano Technologies Series
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references
SUMMARY OR ABSTRACT
Text of Note
New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise
TOPICAL NAME USED AS SUBJECT
Integrated circuits-- Ultra large scale integration-- Testing
Microelectronics
Nanoelectronics
DEWEY DECIMAL CLASSIFICATION
Number
621
.
4
PERSONAL NAME - PRIMARY RESPONSIBILITY
Zalevsky, Zeev
PERSONAL NAME - ALTERNATIVE RESPONSIBILITY
Gur, Eran
Livshits, Pavel
ORIGINATING SOURCE
Date of Transaction
20140507151530.0
Cataloguing Rules (Descriptive Conventions))
rda
ELECTRONIC LOCATION AND ACCESS
Electronic name
مطالعه متن کتاب [Book]
Y
