عنوان
پدید آورنده
موضوع
رده
TA 418 .9 .T45 .C47 2002
TA
418
.
9
.
T45
.
C47
2002
کتابخانه
محل استقرار
133678
بهار۲۸
English
)40(
Chemical physics of thin film deposition processes for micro- and nano-technologies
Dordrecht
Kluwer Academic Publishers
2002
xiii, 363 p.: ill.; 25 cm
NATO science series
v.55
"Published in cooperation with NATO Scientific Affairs Division"
Includes bibliographical references and index
Congresses ، Thin films
Congresses ، Nanotechnology
TA
418
.
9
.
T45
.
C47
2002
TI
edited by Yves Pauleau
AU Y ,uaeluaP
SE
04
