@BOOK{ Book!D - 77812156,
AUTHOR = "volume editor, Norbert Kockmann",
TITLE = "Micro process engineering: fundamentals, devices, fabrication, and applications",
LIBRARY= "کتابخانه مرکزی و مرکز اطلاع رسانی دانشگاه فردوسی مشهد",
SUBJECT = "، Production engineering,، Microtechnology",
URL = "/book/77812156/Micro-process-engineering-fundamentals-devices/"}