عنوان

High Permittivity Gate Dielectric Materials

شابک

3642365353

شابک

9783642365355

شماره

b567803

عنوان اصلي

High Permittivity Gate Dielectric Materials

نام عام مواد

[Book]

نام نخستين پديدآور

edited by Samares Kar.

محل نشرو پخش و غیره

Berlin, Heidelberg

نام ناشر، پخش کننده و غيره

Springer Berlin Heidelberg : Imprint : Springer

تاریخ نشرو بخش و غیره

2013

نام خاص و کميت اثر

(XXXII, 489 p. 325 illustrations, 168 illustrations in color.)

عنوان فروست

Springer Series in Advanced Microelectronics, 43.

متن يادداشت

Historical Perspectives.- High Mobility Channels.- Non-Volatile Memory.- Hafnium-Based Gate Dielectric Materials.- Lanthanum-Based High-K Gate Dielectric Materials.- Crystalline High-K Gate Dielectric Materials.- High-K Gate Dielectric Processing.- Metal Gate Electrodes.- Flat-Band/Threshold Voltage Control.- Interfaces and Defects.- Electrical Characterization and Parameter Extraction.- Non-Contact Metrology of High-K Gate Dielectrics.- Channel Mobility.- High-K Gate Dielectric Reliability Issues.- Bias Temperature Instability.- Integration Issues.

متن يادداشت

The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, including, topics such as MOSFET basics and characteristics, hafnium-based gate dielectric materials, Hf-based gate dielectric processing, metal gate electrodes, flat-band and threshold voltage tuning, channel mobility, high-k gate stack degradation and reliability, lanthanide-based high-k gate stack materials, ternary hafnia and lanthania based high-k gate stack films, crystalline high-k oxides, high mobility substrates, and parameter extraction. Each chapter begins with the basics necessary for understanding the topic, followed by a comprehensive review of the literature, and ultimately graduating to the current status of the technology and our scientific understanding and the future prospects.

موضوع مستند نشده

Electronics.

موضوع مستند نشده

Engineering.

موضوع مستند نشده

Optical materials.

شماره رده

نشانه اثر

مستند نام اشخاص تاييد نشده

edited by Samares Kar.

مستند نام اشخاص تاييد نشده

Samares Kar

نام الکترونيکي

نوع ماده

[Book]

تكميل شده

Y