عنوان

A guide to hands-on MEMS design and prototyping /

شابک

0521889251 (hardback)

شابک

1107645794 (pbk.)

شابک

9780521889254 (hardback)

شابک

9781107645790 (pbk.)

شماره

dltt

عنوان اصلي

A guide to hands-on MEMS design and prototyping /

نام عام مواد

[Book]

نام نخستين پديدآور

Joel Kubby

محل نشرو پخش و غیره

New York :

نام ناشر، پخش کننده و غيره

Cambridge University Press,

تاریخ نشرو بخش و غیره

2011

نام خاص و کميت اثر

xi, 166 p., [16] p. of plates :

ساير جزييات

ill. (some col.) ;

ابعاد

24 cm

متن يادداشت

Includes bibliographical references and index

متن يادداشت

Machine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics

بدون عنوان

8

متن يادداشت

"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Additional resources are provided online, including solutions to the design challenge problems and a selection of case studies of MEMS devices"--

متن يادداشت

"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Additional resources are provided online, including solutions to the design challenge problems and a selection of case studies of MEMS devices"--

موضوع مستند نشده

Microelectromechanical systems

شماره

ويراست

شماره رده

نشانه اثر

مستند نام اشخاص تاييد نشده

Kubby, Joel A

تاريخ عمليات

20111110005811.0

نام الکترونيکي

نوع ماده

[Book]

تكميل شده

Y