: [Proceedings of the NATO Advanced Study institute on Microelectronic materials and processes, IL Ciocco, Castelvecchio Pascoli Italy, June 30- July 11, 1986]
First Statement of Responsibility
/ edited by R. A. Levy
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Dordrecht
Place of Publication, Distribution, etc.
Boston
Name of Publisher, Distributor, etc.
: Kluwer Academic
Name of Publisher, Distributor, etc.
: Kluwer Academic
Date of Publication, Distribution, etc.
, 1989
Date of Publication, Distribution, etc.
, 1989
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xiv, 985 p.
Other Physical Details
: ill
Dimensions
; 25 cm
SERIES
Series Title
NATO ASI Series. Series E, Applied Sciences
Series Title
NATO ASI Series. Series E: Applied Sciences
Volume Designation
; no, 164
Volume Designation
; vol 164
GENERAL NOTES
Text of Note
English
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographies
TOPICAL NAME USED AS SUBJECT
Microelectronics-- Materials-- Congresses
Integrated circuits-- very large scale integration-- Design and Construction-- Congresses
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7874
Book number
.
N339
1989
PERSONAL NAME - PRIMARY RESPONSIBILITY
NATO advanced study institute on Microelectronic Materials and Processes (1986: IL Ciocco, Italy), author