عنوان
پدید آورنده
موضوع
رده
TK 7874 .E495 1986
TK
7874
.
E495
1986
کتابخانه
محل استقرار
NATIONAL BIBLIOGRAPHY NUMBER
Country Code
IR
Number
79773
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
انگلیسی
COUNTRY OF PUBLICATION OR PRODUCTlON
Country of publication
IR
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Microlithography
General Material Designation
[Book]
Other Title Information
: Process technology for IC fabrication
First Statement of Responsibility
/ David J. Elliott
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
New York
Name of Publisher, Distributor, etc.
: McGraw - Hill Book Company
Date of Publication, Distribution, etc.
, 1989
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xix, 378 p.
Other Physical Details
: illus, fig.
Dimensions
; 22 cm
GENERAL NOTES
Text of Note
انگليسي
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes index
TOPICAL NAME USED AS SUBJECT
Integrated Circuits -- Very large scale integration -- Design and construction
Microlithography
Photoresists
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7874
Book number
.
E495
1986
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
Elliott
Part of Name Other than Entry Element
, David J
Relator Code
, author
ORIGINATING SOURCE
Country
Iran
Agency
Central Library Of Tehran University
Old cataloging
BL
1
Y
