عنوان
پدید آورنده
موضوع
رده
TK 7871.85 .S4 2001
TK
7871
.
85
.
S4
2001
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
ISBN 096515775x
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
انگلیسی
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
2001 6th international symposium on plasma-and process in duced damage:may 13-15,2001,mountry,California,USA
First Statement of Responsibility
Manfred Engelhardt,Terence,Hook and Calvin T.Gabrial
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Santaclara
Name of Publisher, Distributor, etc.
Northern Califonia Capture
Date of Publication, Distribution, etc.
2001
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
5,I,127p.:illus
Other Physical Details
1 , 8219 , 2-1
TOPICAL NAME USED AS SUBJECT
Entry Element
Semiconductors wafers-congresses
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
Book number
7871
.
85
Classification Record Number
.
S4
2001
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
2001 6th international symposium on plasma-and process in duced damage:may 13-15,2001,mountry,California,USA
PERSONAL NAME - SECONDARY RESPONSIBILITY
Relator Code
AU
Relator Code
AU
Relator Code
AU
Entry Element
Engelhardt,manfred
Entry Element
Hook,terence
Entry Element
Gabrial,Calvin
