عنوان
پدید آورنده
موضوع
رده
TK 7871.85 .I5834 2002
TK
7871
.
85
.
I5834
2002
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
Terms of Availability and/or Price
خریداری
(Number (ISBN
0965157776 0965157784
NATIONAL BIBLIOGRAPHY NUMBER
Number
02BL0000000010519
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
انگلیسی
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
2002 7th International Symposium on Plasma- and Process-Induced Damage
First Statement of Responsibility
Terence Hook, Koji Eriguchi, and Calvin T. Gabriel, editors ; technical co-sponsors, AVS, IEEE/Electron Devices Society, Japanese Society of Applied Physics
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Santa Clara, California
Name of Publisher, Distributor, etc.
AVS
Date of Publication, Distribution, etc.
,c2002
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
]6[, i, 177 p. ill. 28 cm.
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
June 5-7, 2002, Maui, Hawaii, USA
NOTES PERTAINING TO BINDING AND AVAILABILITY
Text of Note
غیرمرجع
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographic references and author index.
TOPICAL NAME USED AS SUBJECT
Entry Element
Semiconductor wafers- Congresses
Entry Element
Semiconductors- Effect of radiation on- Congresses
Entry Element
Plasma radiation- Congresses
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
Book number
7871
.
85
Classification Record Number
.
I5834
2002
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
International Symposium on Plasma Process-Induced Damage)7th :2002 :Maui, Hawaii(
PERSONAL NAME - ALTERNATIVE RESPONSIBILITY
Entry Element
Some previous Symposia entitled: International Symposium on Plasma Induced-Damage.
Entry Element
"P?p2?sID"--Cover.
Entry Element
"IEEE Catalog Number )softbound( 02TH8582 ; IEEE Catalog Number )CD-ROM( 02TH8582C"--verso of T.p.
PERSONAL NAME - SECONDARY RESPONSIBILITY
Relator Code
AU
Relator Code
AU
Relator Code
AU
Relator Code
AU
Relator Code
AU
Relator Code
AU
Entry Element
Hook, Terence.
Entry Element
Eriguchi, Koji.
Entry Element
Gabriel, Calvin T.
Entry Element
American Vacuum Society.
Entry Element
IEEE Electron Devices Society.
Entry Element
Oyo Butsuri Gakkai.
