عنوان
پدید آورنده
موضوع
رده
TK7875 .E4M4 2001
TK7875
.
E4M4
2001
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
3540675825
NATIONAL BIBLIOGRAPHY NUMBER
Country Code
IR
Number
19090
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
انگلیسی
COUNTRY OF PUBLICATION OR PRODUCTlON
Country of publication
IR
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Mechanical microsensors
General Material Designation
[Book]
First Statement of Responsibility
/ M. Elwenspoek, R.J. Wiergerink
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Berlin
Name of Publisher, Distributor, etc.
: Springer
Date of Publication, Distribution, etc.
, 2001.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
x, 295 p.
Other Physical Details
: ill. 25 cm
SERIES
Series Title
(Microtechnology and MEMS)
NOTES PERTAINING TO PUBLICATION, DISTRIBUTION, ETC.
Text of Note
Print
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and index
TOPICAL NAME USED AS SUBJECT
Detectors- Design and construction
Microelectromechanical systems- Design and construction
Transducers
Silicon
Micromachining
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK7875
Book number
.
E4M4
2001
PERSONAL NAME - PRIMARY RESPONSIBILITY
Elwenspoek, M.(Miko),1948-
PERSONAL NAME - SECONDARY RESPONSIBILITY
Wiegerink, Remco J.,1964-
ORIGINATING SOURCE
Country
ایران
Agency
Isfahan University of Medical Sciences
old catalog
p
BL
1
a
Y
