عنوان
پدید آورنده
موضوع
رده
TA 2020 .N64D713
TA
2020
.
N64D713
کتابخانه
محل استقرار
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Dry etching technology for semiconductors
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Switzerland
Name of Publisher, Distributor, etc.
Springer
Date of Publication, Distribution, etc.
c2015
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xiii, 116 p.: ill.
GENERAL NOTES
Text of Note
"Based on translation from the Japanese language edition : Hajimete no handotai dry etching gijutsu by Kazuo Nojiri"
Text of Note
Includes bibliographies
Text of Note
ISBN: 9783319102948
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
Kazuo Nojiri
ORIGINAL VERSION NOTE
Text of Note
1
TOPICAL NAME USED AS SUBJECT
Entry Element
، Plasma etching
Entry Element
، Semiconductors -- Etching
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TA
2020
.
N64D713
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
Nojiri, Kazuo
Relator Code
AU
TI
