عنوان
پدید آورنده
موضوع
رده
TS 156.2 .O67
TS
156
.
2
.
O67
کتابخانه
محل استقرار
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Optical inspection of microsystems
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boca Raton, FL
Name of Publisher, Distributor, etc.
CRC/Taylor & Francis
Date of Publication, Distribution, etc.
c2007
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
503 p., ]8[ p. of plates : ill. )some col.(
SERIES
Other Title Information
Optical science and engineering; 901
GENERAL NOTES
Text of Note
Includes bibliographies
Text of Note
ISBN: 0849336821
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
edited by Wolfgang Osten
ORIGINAL VERSION NOTE
Text of Note
1
TOPICAL NAME USED AS SUBJECT
Entry Element
، Quality control -- Optical methods
Entry Element
Industrial applications ، Optical detectors
Entry Element
، Microelectronics
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TS
156
.
2
.
O67
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
AU Osten, Wolfgang
SE Optical science and engineering )Boca Raton, Fla.( 109
