عنوان
پدید آورنده
موضوع
رده
TK 7875 .C667 2005
TK
7875
.
C667
2005
کتابخانه
محل استقرار
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
CMOS-MEMS
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Weinheim
Name of Publisher, Distributor, etc.
Wiley-VCH
Date of Publication, Distribution, etc.
c2005
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
ix, 594 p.: ill.; 25 cm
SERIES
Other Title Information
Advanced micro & nanosystems; v.2
GENERAL NOTES
Text of Note
Includes bibliographical references and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
volume editors: O. Brand and G.K. Fedder
ORIGINAL VERSION NOTE
Text of Note
1
TOPICAL NAME USED AS SUBJECT
Entry Element
، Metal oxide semiconductors, Complementary
Entry Element
، Microelectromechanical systems
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7875
.
C667
2005
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
AU Brand, Oliver 1964-
AU Fedder, G.K. )Gary K.(
