عنوان
پدید آورنده
موضوع
رده
TK 7874.84 .P35 2009
TK
7874
.
84
.
P35
2009
کتابخانه
محل استقرار
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Nanoparticle engineering for chemical-mechanical planarization: fabrication of next-generation nanodevices
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boca Raton
Name of Publisher, Distributor, etc.
CRC Press / Taylor & Francis
Date of Publication, Distribution, etc.
c2009
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xiii, 191 p.: ill.
GENERAL NOTES
Text of Note
"A CRC title."
Text of Note
Includes bibliographical references )p. 171-175( and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
authors, Ungyu Paik, Jea-Gun Park
ORIGINAL VERSION NOTE
Text of Note
1
TOPICAL NAME USED AS SUBJECT
Entry Element
، Chemical mechanical planarization
Entry Element
، Nanoparticles
Entry Element
، Nanoelectronics
DEWEY DECIMAL CLASSIFICATION
Number
621
.
3815/2
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7874
.
84
.
P35
2009
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
Paik, Ungyu.
Relator Code
AU
AU Park, Jea-Gun
TI
