عنوان
پدید آورنده
موضوع
رده
TK 7871.85 .I58 1983
TK
7871
.
85
.
I58
1983
کتابخانه
محل استقرار
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Ion implantation : equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Berlin, New York
Name of Publisher, Distributor, etc.
Springer-Verlag
Date of Publication, Distribution, etc.
1983
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
x, 556 p. : ill. ; 24 cm
SERIES
Other Title Information
Springer series in electrophysics, v. 11
GENERAL NOTES
Text of Note
Includes bibliographical references and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
editors, H. Ryssel and H. Glawischnig
ORIGINAL VERSION NOTE
Text of Note
1
TOPICAL NAME USED AS SUBJECT
Entry Element
Congresses ، Ion implantation
Entry Element
Congresses ، Semiconductor doping
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7871
.
85
.
I58
1983
OTHER CLASS NUMBERS
Class number
CA
Class number
621
.
3815/2
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
AU Ryssel, Heiner 1941-
AU Glawischnig, H.)Hans( 1939-
CO International Conference on Ion Implantation: Equipment and Techniques, )4th, 2891, Berchtesgaden, Germany(
SE
