عنوان
پدید آورنده
موضوع
رده
TK 7871.85 .I5 1982
TK
7871
.
85
.
I5
1982
کتابخانه
محل استقرار
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Ion implantation techniques : lectures given at the Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Berlin, New York
Name of Publisher, Distributor, etc.
Springer-Verlag
Date of Publication, Distribution, etc.
1982
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xii, 372 p. : ill. ; 24 cm
SERIES
Other Title Information
Springer series in electrophysics, v. 01
GENERAL NOTES
Text of Note
Includes bibliographies and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
editors, H. Ryssel and H. Glawischnig
ORIGINAL VERSION NOTE
Text of Note
1
TOPICAL NAME USED AS SUBJECT
Entry Element
، Ion implantation
Entry Element
، Semiconductor doping
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7871
.
85
.
I5
1982
OTHER CLASS NUMBERS
Class number
CA
Class number
621
.
3815/2
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
AU Ryssel, Heiner 1941-
AU Glawischnig, H.)Hans( 1939-
CO International Conference on Ion Implantation: Equipment and Techniques, )4th, 2891, Berchtesgaden, Germany(
SE
CORPORATE BODY NAME - PRIMARY RESPONSIBILITY
Entry Element
Ion Implantation School, )1982, Berchtesgaden, Germany(
