عنوان
پدید آورنده
موضوع
رده
TK 7836 .M33 2002
TK
7836
.
M33
2002
کتابخانه
محل استقرار
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Fundamentals of microfabrication : the science of miniaturization
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boca Raton
Name of Publisher, Distributor, etc.
CRC Press
Date of Publication, Distribution, etc.
c2002
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
723 p. : col. ill. ; 29 cm.
GENERAL NOTES
Text of Note
Includes bibliographical references and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
Marc J. Madou
ORIGINAL VERSION NOTE
Text of Note
1
Text of Note
2
TOPICAL NAME USED AS SUBJECT
Entry Element
، Microelectronics
Entry Element
، Integrated circuits - Design and construction
Entry Element
Design and construction ، Microelectromechanical systems
Entry Element
، Machining
Entry Element
، Microelectronic packaging
Entry Element
، Lasers - Industrial applications
DEWEY DECIMAL CLASSIFICATION
Number
621
.
3815/2
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7836
.
M33
2002
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
Madou, Marc J.
Relator Code
AU
TI
