عنوان
پدید آورنده
موضوع
رده
TK 7871.85 .M3F81
TK
7871
.
85
.
M3F81
کتابخانه
محل استقرار
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Fundamentals of semiconductor manufacturing and process control
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
]Piscataway[ : Wiley-Interscience
Name of Publisher, Distributor, etc.
IEEE ; Hoboken,
Date of Publication, Distribution, etc.
2006
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xix,463 p. : illus, tables.
GENERAL NOTES
Text of Note
Includes bibliographical references and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
Gary S. May, Costas J. Spanos
ORIGINAL VERSION NOTE
Text of Note
1
TOPICAL NAME USED AS SUBJECT
Entry Element
Design and construction ، Semiconductors
Entry Element
Design and construction ، Integrated circuits
Entry Element
Statistical methods ، Process control
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7871
.
85
.
M3F81
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
May, Gary S.
Relator Code
AU
AU Spanos, Costas J.
TI
