عنوان
پدید آورنده
موضوع
رده
TK 7875 .M45
TK
7875
.
M45
کتابخانه
محل استقرار
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
MEMS mechanical sensors
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boston
Name of Publisher, Distributor, etc.
Artech House
Date of Publication, Distribution, etc.
2004
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
x,269 p. : illus, tables
SERIES
Other Title Information
Artech House microelectromechanical system series
GENERAL NOTES
Text of Note
Includes bibliographical references and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
Stephen Beeby ... ]et al.[
ORIGINAL VERSION NOTE
Text of Note
1
TOPICAL NAME USED AS SUBJECT
Entry Element
، Microelectromechanical systems
Entry Element
، Detectors
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7875
.
M45
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
AU Beeby, Stephen
SE
SE Microelectromechanical systems series
