عنوان
پدید آورنده
موضوع
رده
TK7872 .M3E987 2009
TK7872
.
M3E987
2009
کتابخانه
محل استقرار
استان: East Azarbaijan ـ شهر: Tabriz
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
9780071549189
NATIONAL BIBLIOGRAPHY NUMBER
Country Code
IR
Number
90-714
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
انگلیسی
COUNTRY OF PUBLICATION OR PRODUCTlON
Country of publication
IR
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Extreme ultraviolet lithography
General Material Designation
[Book]
First Statement of Responsibility
/ [edited by] Banqiu Wu, Ajay Kumar
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
New York
Name of Publisher, Distributor, etc.
: McGraw-Hill,
Date of Publication, Distribution, etc.
, c2009.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xiv, 465 p.
Other Physical Details
: ill.
Dimensions
; 24 cm.
GENERAL NOTES
Text of Note
Language: انگلیسی
NOTES PERTAINING TO PUBLICATION, DISTRIBUTION, ETC.
Text of Note
Print
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and index.
TOPICAL NAME USED AS SUBJECT
Extreme ultraviolet lithography
Integrated circuits, Masks
Integrated circuits, Design and construction
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK7872
Book number
.
M3E987
2009
PERSONAL NAME - SECONDARY RESPONSIBILITY
Wu, Banqiu
Kumar, Ajay,1962-
ORIGINATING SOURCE
Country
ایران
old catalog
p
BL
1
a
Y
