(Nano- and microscience, engineering, technology, and medicine series.)
NOTES PERTAINING TO PUBLICATION, DISTRIBUTION, ETC.
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Print
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
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Includes bibliographical references and index.
CONTENTS NOTE
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Nano- and microengineering, and nano- and microtechnologies --Mathematical models and design of nano- and microelectromechanical systems --Structural design, modeling, and simulation --Control of nano- and microelectromechanical systems.