INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
0471005770
NATIONAL BIBLIOGRAPHY NUMBER
Country Code
IR
Number
E-160
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
انگلیسی
COUNTRY OF PUBLICATION OR PRODUCTlON
Country of publication
IR
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Principles of plasma discharges and materials processing
General Material Designation
[Book]
First Statement of Responsibility
/ Michael A. Lieberman, Allan J. Lichtenberg
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
New York
Name of Publisher, Distributor, etc.
: Wiley
Date of Publication, Distribution, etc.
, 1994.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xxvi, 572 p. , ill. , 24 cm.
GENERAL NOTES
Text of Note
"A Wiley-Interscience publication."
NOTES PERTAINING TO PUBLICATION, DISTRIBUTION, ETC.
Text of Note
Electronic
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references (p. 559-564) and index.
TOPICAL NAME USED AS SUBJECT
Plasma dynamics
Thin films, Surfaces
Plasma etching
Plasma chemistry
LIBRARY OF CONGRESS CLASSIFICATION
Class number
QC718
.
5
Book number
.
D9L54
1994
PERSONAL NAME - PRIMARY RESPONSIBILITY
Lieberman, M. A.( Michael A.)
PERSONAL NAME - SECONDARY RESPONSIBILITY
Lichtenberg, Allan J
ORIGINATING SOURCE
Country
ایران
ELECTRONIC LOCATION AND ACCESS
Host name
E-160
Access number
عادی
Compression information
عادی
Electronic name
E-160.DJVU
Bits per second
6514183
Contact for access assistance
مختارزاده
Port
04710057701-M.jpg
Electronic Format Type
متن
File size
0
Record control number
E-160
Public note
انگلیسی
old catalog
e
BL
1
a
Y
