INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
9784431547952
NATIONAL BIBLIOGRAPHY NUMBER
Country Code
IR
Number
EN-7978
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
انگلیسی
COUNTRY OF PUBLICATION OR PRODUCTlON
Country of publication
IR
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
wafer Monitoring System-Feature Profile Evolution in Plasma Processing Using On
General Material Designation
[Book]
First Statement of Responsibility
/ Seiji Samukawa
.PUBLICATION, DISTRIBUTION, ETC
Name of Publisher, Distributor, etc.
Springer
Date of Publication, Distribution, etc.
, 2014.
NOTES PERTAINING TO PUBLICATION, DISTRIBUTION, ETC.
Text of Note
Electronic
TOPICAL NAME USED AS SUBJECT
ENGINEERING, CIVIL|ENGINEERING, MULTIDISCIPLINARY
LIBRARY OF CONGRESS CLASSIFICATION
Class number
E-BOOK
PERSONAL NAME - PRIMARY RESPONSIBILITY
Seiji Samukawa
ORIGINATING SOURCE
Country
ایران
ELECTRONIC LOCATION AND ACCESS
Host name
Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System
Access number
عادی
Compression information
محرمانه
Date and Hour of Consultation and Access
461128.pdf
Electronic Format Type
متن
old catalog
e
BL
1
a
Y
