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Nanoparticle engineering for chemical-mechanical planarization
پدید آورنده
/ Ungyu Paik, Jea-Gun Park
موضوع
Chemical mechanical planarization.,Nanoparticles.,Nanoelectronics.
رده
TK7874
.
84
.
P35
2009
کتابخانه
Central Library, Center of Documentation and Supply of Scientific Resources
محل استقرار
استان:
East Azarbaijan
ـ شهر:
تماس با کتابخانه :
04133443834
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
9781420059113 (hardcover : alk. paper)
NATIONAL BIBLIOGRAPHY NUMBER
Country Code
IR
Number
E-8850
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
انگلیسی
COUNTRY OF PUBLICATION OR PRODUCTlON
Country of publication
IR
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Nanoparticle engineering for chemical-mechanical planarization
General Material Designation
[Book]
Other Title Information
:fabrication of next-generation nanodevices
First Statement of Responsibility
/ Ungyu Paik, Jea-Gun Park
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boca Raton, FL
Name of Publisher, Distributor, etc.
: CRC Press/Taylor & Francis Group,
Date of Publication, Distribution, etc.
, c2009.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xiii, 191 p., [14] p. of plates
Other Physical Details
: ill. (some col.)
Dimensions
; 25 cm.
NOTES PERTAINING TO PUBLICATION, DISTRIBUTION, ETC.
Text of Note
Print - Electronic
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references (p. 171-175) and index.
TOPICAL NAME USED AS SUBJECT
Chemical mechanical planarization.
Nanoparticles.
Nanoelectronics.
DEWEY DECIMAL CLASSIFICATION
Number
621
.
3815
.
2
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK7874
.
84
Book number
.
P35
2009
PERSONAL NAME - PRIMARY RESPONSIBILITY
Paik, Ungyu
PERSONAL NAME - SECONDARY RESPONSIBILITY
Park, Jea-Gun
ORIGINATING SOURCE
Country
ایران
ELECTRONIC LOCATION AND ACCESS
Host name
Nanoparticle Engineering for Chemical-Mechanical Planarization: Fabrication of Next-Generation Nanodevices
Access number
عادی
Compression information
عادی
Electronic name
E-8850.pdf
Bits per second
0
Contact for access assistance
ایمانی
Electronic Format Type
متن
File size
0
Record control number
E-8850
Public note
انگلیسی
old catalog
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1
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