INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
0471720011 (acid-free paper)
NATIONAL BIBLIOGRAPHY NUMBER
Country Code
IR
Number
E-7713
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
انگلیسی
COUNTRY OF PUBLICATION OR PRODUCTlON
Country of publication
IR
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Principles of plasma discharges and materials processing
General Material Designation
[Book]
First Statement of Responsibility
/ Michael A. Lieberman, Allan J. Lichtenberg
EDITION STATEMENT
Edition Statement
2nd ed.
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Hoboken, N.J.
Name of Publisher, Distributor, etc.
: Wiley-Interscience
Date of Publication, Distribution, etc.
, 2005.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xxxv, 757 p. , ill. , 25 cm.
NOTES PERTAINING TO PUBLICATION, DISTRIBUTION, ETC.
Text of Note
Electronic
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references (p. 735-748) and index.
TOPICAL NAME USED AS SUBJECT
Plasma dynamics
Thin films- Surfaces
Plasma etching
Plasma chemistry- Industrial applications
LIBRARY OF CONGRESS CLASSIFICATION
Class number
QC718
.
5
Book number
.
D9L54
2005
PERSONAL NAME - PRIMARY RESPONSIBILITY
Lieberman, M. A.(Michael A.)
PERSONAL NAME - SECONDARY RESPONSIBILITY
Lichtenberg, Allan J
ORIGINATING SOURCE
Country
ایران
ELECTRONIC LOCATION AND ACCESS
Host name
Principles of plasma discharges and materials processing
Access number
عادی
Compression information
عادی
Electronic name
E-7714.pdf
Bits per second
0
Contact for access assistance
ایمانی
Electronic Format Type
متن
File size
0
Record control number
E-7713
Public note
انگلیسی
old catalog
e
BL
1
a
Y
