INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
9780470013601 (hbk.)
NATIONAL BIBLIOGRAPHY NUMBER
Country Code
IR
Number
EN-55550
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
انگلیسی
COUNTRY OF PUBLICATION OR PRODUCTlON
Country of publication
IR
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Dielectric films for advanced microelectronics
General Material Designation
[Book]
First Statement of Responsibility
/ edited by Mikhail Baklanov, Martin Green, and Karen Maex
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Chichester, England ;Hoboken, NJ
Name of Publisher, Distributor, etc.
: John Wiley & Sons,
Date of Publication, Distribution, etc.
, c2007.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xxii, 486 p. , ill. , 26 cm.
SERIES
Series Title
(Wiley series in materials for electronic and optoelectronic applications)
NOTES PERTAINING TO PUBLICATION, DISTRIBUTION, ETC.
Text of Note
Electronic
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and index.
CONTENTS NOTE
Text of Note
Low and ultralow dielectric constant films prepared by plasma-enhanced chemical vapor deposition /A. Grill --Spin-on dielectric materials /Geraud Dubois, Robert D. Miller, Willi Volksen --Positron annihilation spectroscopy /David W. Gidley, Hua-Gen Peng, Richard Vallery --Structure characterization of nanoporous interlevel dielectric thin films with-ray and neutron radiation /Christopher L. Soles ... [et al.] --Ellipsometric porosimetry /Mikhail R. Baklanov --Mechanical and transport properties of low-k dielectrics /J. L. Plawsky ... [et al.] --Integration of low-k dielectric films in damascene processes /R. J. O. M. Hoofman ... [et al.] --ONO structures and oxynitrides in modern microelectronics : material science, characterization and application /Yakov Roizin, Vladimir Gritsenko --Material engineering of high-k gate dielectrics /Akira Toriumi, Koji Kita --Physical characterization of ultra-thin high-k dielectric /T. Conard, H. Bender, W. Vandervorst --Electrical characterization of advanced gate dielectrics /Robin Degraeve ... [et al.] --Integration issues of high-k gate dielectrics /Yasuo Nara --Anisotropic conductive film (ACF) for advanced microelectronic interconnects /Yi Li, C. P. Wong.
TOPICAL NAME USED AS SUBJECT
Dielectric films
Microelectronic--Materials
LIBRARY OF CONGRESS CLASSIFICATION
Class number
E-BOOK
PERSONAL NAME - SECONDARY RESPONSIBILITY
Baklanov, Mikhail
Green, Martin
Maex, Karen
ORIGINATING SOURCE
Country
ایران
ELECTRONIC LOCATION AND ACCESS
Host name
9780470013601.pdf
Access number
عادی
Compression information
عادی
Date and Hour of Consultation and Access
9780470013601.pdf
Electronic Format Type
0
old catalog
e
BL
1
a
Y
