عنوان
پدید آورنده
موضوع
رده
QC611.6 .S9H36 2011 R
QC611
.
6
.
S9H36
2011
R
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
978-0-470-62595-8
NATIONAL BIBLIOGRAPHY NUMBER
Country Code
IR
Number
10703
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
انگلیسی
COUNTRY OF PUBLICATION OR PRODUCTlON
Country of publication
IR
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Handbook of cleaning for semiconductor manufacturing
General Material Designation
[Book]
Other Title Information
:fundamentals and applications
First Statement of Responsibility
/ [edited by] Karen A. Reinhardt, Richard F. Reidy
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Hoboken, N.J.
Name of Publisher, Distributor, etc.
: John Wiley & Sons, Inc.,
Date of Publication, Distribution, etc.
, 2011.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xxii, 590 p.
Other Physical Details
: ill.
Dimensions
; 26 cm.
GENERAL NOTES
Text of Note
Language: انگلیسی
NOTES PERTAINING TO PUBLICATION, DISTRIBUTION, ETC.
Text of Note
Print
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and index.
TOPICAL NAME USED AS SUBJECT
Semiconductors--Surfaces--Cleaning
DEWEY DECIMAL CLASSIFICATION
Number
621
.
3815
.
2
R
LIBRARY OF CONGRESS CLASSIFICATION
Class number
QC611
.
6
Book number
.
S9H36
2011
R
PERSONAL NAME - PRIMARY RESPONSIBILITY
Reinhardt, Karen A
PERSONAL NAME - SECONDARY RESPONSIBILITY
Reidy, Richard F.، 1960
ORIGINATING SOURCE
Country
ایران
old catalog
p
BL
1
a
Y
