عنوان
پدید آورنده
موضوع
رده
TJ1191.5 M5525 2007
TJ1191
.
5
M5525
2007
کتابخانه
محل استقرار
استان: Mazandaran ـ شهر: Babolsar
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
9781402059 1402059485
NATIONAL BIBLIOGRAPHY NUMBER
Number
27468
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
eng
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Micromanufacturing
Other Title Information
:international research and development
First Statement of Responsibility
/ K.F. Ehmann ... [et al.]
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Dordrecht
Name of Publisher, Distributor, etc.
: Springer,
Date of Publication, Distribution, etc.
, 2007.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xxxiv, 362 p
Other Physical Details
. ill. 25 cm.
GENERAL NOTES
Text of Note
Language: انگلیسی
Text of Note
"WTEC"--Cover.
NOTES PERTAINING TO PUBLICATION, DISTRIBUTION, ETC.
Text of Note
Print
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
ng
Text of Note
Includes bibliographical references.
CONTENTS NOTE
Text of Note
Introduction / Richard E. DeVor and Kornel F. Ehmann -- Design / Martin L. Culpepper and Thomas R. Kurfess -- Materials / David Bourell and Kamlakar Rajurkar -- Processes / Kamlakar Rajurkar and Marc Madou -- Metrology, sensors and control / Thomas R. Kurfess and Thom J. Hodgson -- Non-lithography applications / Marc Madou -- Business, education, the environment, and other issues / Thom J. Hodgson.
TOPICAL NAME USED AS SUBJECT
Entry Element
Microfabrication
Entry Element
Micromachining
DEWEY DECIMAL CLASSIFICATION
Number
670
.
4
PERSONAL NAME - SECONDARY RESPONSIBILITY
Ehmann, K. F.(Kornel F.)
old catalog
