عنوان
پدید آورنده
موضوع
رده
TK 7836 .M523
TK
7836
.
M523
کتابخانه
محل استقرار
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Microfabrication and nanomanufacturing
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boca Raton, FL
Name of Publisher, Distributor, etc.
CRC/Taylor & Francis
Date of Publication, Distribution, etc.
c2006
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
401 p. : ill
GENERAL NOTES
Text of Note
Includes bibliographical references and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
edited by Mark J. Jackson
TOPICAL NAME USED AS SUBJECT
Entry Element
، Microelectronics
Entry Element
Design and construction ، Integrated circuits
Entry Element
Design and construction ، Microelectromechanical systems
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7836
.
M523
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
AU Jackson, Mark J.
