عنوان
پدید آورنده
موضوع
رده
TA 1520 .U35
TA
1520
.
U35
کتابخانه
محل استقرار
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Micromechanical photonics
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Berlin
Name of Publisher, Distributor, etc.
Springer-Verlag
Date of Publication, Distribution, etc.
c2006
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xi, 250 p. : ill
SERIES
Other Title Information
Microtechnology and MEMS,5161-6238
GENERAL NOTES
Text of Note
Includes bibliographical references )p.]227[-242( and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
H. Ukita
TOPICAL NAME USED AS SUBJECT
Entry Element
، Photonics
Entry Element
، Microelectronics
Entry Element
، Microelectromechanical systems
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TA
1520
.
U35
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
Ukita, Hiroo
Relator Code
AU
TI
