عنوان
پدید آورنده
موضوع
رده
TS 156 .2 .O652
TS
156
.
2
.
O652
کتابخانه
محل استقرار
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Optical inspection of microsystems
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boca Raton, FL
Name of Publisher, Distributor, etc.
CRC/Taylor & Francis
Date of Publication, Distribution, etc.
c2007
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
503 p., ]8[ p. of plates : ill. )some col.(
SERIES
Other Title Information
Optical science and engineering
Other Title Information
109
GENERAL NOTES
Text of Note
Includes bibliographical references and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
edited by Wolfgang Osten
TOPICAL NAME USED AS SUBJECT
Entry Element
Optical methods ، Quality control
Entry Element
Industrial applications ، Optical detectors
Entry Element
، Microelectronics
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TS
156
.
2
.
O652
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
AU Osten, Wolfgang
