عنوان
پدید آورنده
موضوع
رده
TK 7875 .F73
TK
7875
.
F73
کتابخانه
محل استقرار
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Introduction to microfabrication
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Chichester
Name of Publisher, Distributor, etc.
Wiley
Date of Publication, Distribution, etc.
c2004
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xvii, 401 p. : ill
GENERAL NOTES
Text of Note
Includes bibliographical references and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
Sami Franssila
TOPICAL NAME USED AS SUBJECT
Entry Element
، Microelectromechanical systems
Entry Element
، Electronic apparatus and appliances
Entry Element
، Microfabrication
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7875
.
F73
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
Franssila, Sami
Relator Code
AU
TI
