عنوان
پدید آورنده
موضوع
رده
TJ 1191 .5 .J64
TJ
1191
.
5
.
J64
کتابخانه
محل استقرار
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
An introduction to surface-micromachining
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boston
Name of Publisher, Distributor, etc.
Kluwer Academic Publishers
Date of Publication, Distribution, etc.
c2004
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
x, 186 p. : ill
GENERAL NOTES
Text of Note
Includes bibliographical references and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
by Robert W. Johnstone, M. Parameswaran
TOPICAL NAME USED AS SUBJECT
Entry Element
، Micromachining
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TJ
1191
.
5
.
J64
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
Johnstone, Robert W.
Relator Code
AU
AU Parameswaran, M.
TI
