عنوان
پدید آورنده
موضوع
رده
TK 7871 .85 .S88
TK
7871
.
85
.
S88
کتابخانه
محل استقرار
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Plasma etching: fundamentals and applications
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Oxford
Name of Publisher, Distributor, etc.
Oxford University Press
Date of Publication, Distribution, etc.
1998
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
viii, 347 p. : ill
SERIES
Other Title Information
Series on semiconductor science and technology; 7
GENERAL NOTES
Text of Note
Includes bibliographical references and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
M. Sugawara; with contributions from Barry L. Stansfield, S. Handa, K. Fujita, S. Watanabe, T. Tsukamoto
ORIGINAL VERSION NOTE
Text of Note
1
TOPICAL NAME USED AS SUBJECT
Entry Element
، Semiconductors - Etching
Entry Element
، Plasma etching
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7871
.
85
.
S88
OTHER CLASS NUMBERS
Class number
NO
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
Sugawara, Minoru
Relator Code
AU
AU Stansfield, Barry L.
AU Fujita, K. 1942-
TI
