Microelectronic materials and processes: ]proceedings of the NATO Aadvanced Study Institute on Microelectronic Materials and Processes, Il Ciocco, Castelvecchio Pascoli, Italy, June 30-July 11, 1986[
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Dordrecht; Boston
Name of Publisher, Distributor, etc.
Kluwer Academic
Date of Publication, Distribution, etc.
c1989
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xiv, 985 p. : ill
SERIES
Other Title Information
NATO ASI series. Series E, Applied sciences
Other Title Information
v.164
GENERAL NOTES
Text of Note
Includes bibliographical references
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
edited by R.A. Levy
ORIGINAL VERSION NOTE
Text of Note
1
TOPICAL NAME USED AS SUBJECT
Entry Element
، Microelectronics- Materials- Congresses
Entry Element
، Integrated circuits- Very large scale integration- Design and construction- Congresses
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7874
.
N339
1986
OTHER CLASS NUMBERS
Class number
NO
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
NATO Advanced Study Institute on Microelectronic Materials and Processes )6891: Il Ciocco, Italy(