عنوان
پدید آورنده
موضوع
رده
TK 7874 .E495
TK
7874
.
E495
کتابخانه
محل استقرار
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Microlithography process technology for IC fabrication
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
New York
Name of Publisher, Distributor, etc.
McGraw-Hill
Date of Publication, Distribution, etc.
c1986
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xix, 378 p. : ill. ; 24 cm
GENERAL NOTES
Text of Note
Includes bibliographies and index.
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
David J. Elliott
ORIGINAL VERSION NOTE
Text of Note
1
TOPICAL NAME USED AS SUBJECT
Entry Element
، Integrated circuits -- Very large scale integration -- Design and construction
Entry Element
، Microlithography
Entry Element
، Photoresists
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7874
.
E495
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
Elliott, David J.
Relator Code
AU
TI
