عنوان
پدید آورنده
موضوع
رده
TK 7874.76 .U57 1996
TK
7874
.
76
.
U57
1996
کتابخانه
محل استقرار
CE
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
ULSI technology
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
New York
Name of Publisher, Distributor, etc.
McGraw-Hill
Date of Publication, Distribution, etc.
1996
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xxv, 726 p.: ill
SERIES
Series Title
McGraw-Hill series in electrical and computer engineering
GENERAL NOTES
Text of Note
McGraw-Hill International editions-cover
Text of Note
Includes bibliographies and index
TOPICAL NAME USED AS SUBJECT
Entry Element
Integrated circuits - Ultra large scale integration
Entry Element
Metallic films
Entry Element
Lithography
Entry Element
Electrochemical metallizing
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
Book number
7874
.
76
Classification Record Number
.
U57
1996
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
Entry Element
edited by C.Y. chang, S.M. Sze
