عنوان
پدید آورنده
موضوع
رده
QD 1 .A355 no. 221
QD
1
.
A355
no
.
221
کتابخانه
محل استقرار
CE L1
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Microelectronics processing : chemical engineering aspects
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
washington, DC.
Name of Publisher, Distributor, etc.
American Chemical Society
Date of Publication, Distribution, etc.
1989
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xiv, 547 p. : ill
SERIES
Series Title
Advances in chemistry series
GENERAL NOTES
Text of Note
Includes bibliographical references
TOPICAL NAME USED AS SUBJECT
Entry Element
Microelectronics Materials
Entry Element
Integrated circuits Design and construction
Entry Element
Surface chemistry
LIBRARY OF CONGRESS CLASSIFICATION
Class number
QD
Book number
1
Classification Record Number
.
A355
no
.
221
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
Entry Element
Dennis W. Hess, editor Klavs F. Jensen, editor
