عنوان
پدید آورنده
موضوع
رده
TK 7874 .B73 1982
TK
7874
.
B73
1982
کتابخانه
محل استقرار
استان: Khorasan Razavi ـ شهر: Sabzevar
OTHER STANDARD IDENTIFIER
Standard Number
6315
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
First Statement of Responsibility
Brodie, Ivor
Title Proper
The physics of microfabrication
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
New York
Name of Publisher, Distributor, etc.
Plenum Press
Date of Publication, Distribution, etc.
2891c
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xix, 503 p.: ill.
GENERAL NOTES
Text of Note
Includes bibliographical references )p. 472 - 489( and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
Ivor Brodie, Julius J. Muray
TOPICAL NAME USED AS SUBJECT
Entry Element
، Microelectronics
Entry Element
، Thin-film circuits
Entry Element
، Microfabrication
DEWEY DECIMAL CLASSIFICATION
Number
7/183
.
126
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7874
.
B73
1982
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
AU Muray, Julius J.
TI
