عنوان
پدید آورنده
موضوع
رده
TS695 .W37 1992
TS695
.
W37
1992
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
0815512805
(Number (ISBN
9780815512806
NATIONAL BIBLIOGRAPHY NUMBER
Number
b787767
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Handbook of sputter deposition technology :
General Material Designation
[Book]
Other Title Information
principles, technology, and applications /
First Statement of Responsibility
by Kiyotaka Wasa and Shigeru Hayakawa.
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Park Ridge, N.J., U.S.A. :
Name of Publisher, Distributor, etc.
Noyes Publications,
Date of Publication, Distribution, etc.
©1992.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xii, 304 pages :
Other Physical Details
illustrations ;
Dimensions
24 cm.
SERIES
Series Title
Materials science and process technology series
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and index.
SUMMARY OR ABSTRACT
Text of Note
A concise, comprehensive overview of sputter deposition technologyua key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.
TOPICAL NAME USED AS SUBJECT
Cathode sputtering (Plating process)
Thin films.
Beschichten
Cathode sputtering (Plating process)
Cathode sputtering (Plating process)
Couches minces métalliques.
Couches minces.
Dünnschichttechnik
Materiais e dispositivos semicondutores.
Pulvérisation cathodique.
Sputtern
Thin films.
DEWEY DECIMAL CLASSIFICATION
Number
621
.
3815/2
Edition
20
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TS695
Book number
.
W37
1992
OTHER CLASS NUMBERS
Class number
33
.
68
Class number
52
.
78
Class number
537
.
525
Class number
UP
7550
Class number
ZM
7620
System Code
bcl
System Code
bcl
System Code
rvk
System Code
rvk
PERSONAL NAME - PRIMARY RESPONSIBILITY
Wasa, Kiyotaka.
PERSONAL NAME - ALTERNATIVE RESPONSIBILITY
Hayakawa, Shigeru,1925-
ORIGINATING SOURCE
Date of Transaction
20201207012618.0
ELECTRONIC LOCATION AND ACCESS
Electronic name
مطالعه متن کتاب [Book]
Y
