عنوان
پدید آورنده
موضوع
رده
TK7875 .H36 2010eb
TK7875
.
H36
2010eb
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
0080947727
(Number (ISBN
9780080947723
Erroneous ISBN
0815515944
Erroneous ISBN
9780815515944
NATIONAL BIBLIOGRAPHY NUMBER
Number
b736820
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Handbook of silicon based MEMS materials and technologies /
General Material Designation
[Book]
First Statement of Responsibility
Veikko Lindroos [and others].
EDITION STATEMENT
Edition Statement
1st ed.
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boston :
Name of Publisher, Distributor, etc.
William Andrew/Elsevier,
Date of Publication, Distribution, etc.
2010.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
1 online resource (xxxii, 636 pages) :
Other Physical Details
illustrations
SERIES
Series Title
Micro & nano technologies
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and index.
CONTENTS NOTE
Text of Note
Front Cover; Handbook of Silicon Based MEMS Materials and Technologies; Copyright Page; Contents; Preface; List of Contributors; Overview; PART I: Silicon as MEMS Material; PART II: Modeling in MEMS Methods; PART III: Measuring MEMS; PART IV: Micromachining Technologies in MEMS; PART V: Encapsulation of MEMS Components; Appendix 1 Common Abbreviations and Acronyms; Appendix 2 Nanoindentation Characterization of Silicon and other MEMS Materials; Index.
0
SUMMARY OR ABSTRACT
Text of Note
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. . Key topics covered include: .: . .; Silicon as MEMS material .; Material properties and measurement techniques .; Analytical methods used in materials characterization .; Modeling in MEMS .; Measuring MEMS .; Micromachining technologies in MEMS .; Encapsulation of MEMS components .; Emerging process technologies, including ALD and porous silicon ... Written by 73 world class MEMS contributors from around the glo.
ACQUISITION INFORMATION NOTE
Source for Acquisition/Subscription Address
MIL
Stock Number
254114
OTHER EDITION IN ANOTHER MEDIUM
Title
Handbook of silicon based MEMS materials and technologies.
International Standard Book Number
9780815515944
TOPICAL NAME USED AS SUBJECT
Microelectromechanical systems-- Materials.
Microelectromechanical systems.
Silicon-- Electric properties.
MEMS
Microelectromechanical systems-- Materials.
Microelectromechanical systems.
Silicium
Silicon-- Electric properties.
TECHNOLOGY & ENGINEERING-- Electronics-- Semiconductors.
TECHNOLOGY & ENGINEERING-- Electronics-- Solid State.
(SUBJECT CATEGORY (Provisional
TEC-- 008090
TEC-- 008100
DEWEY DECIMAL CLASSIFICATION
Number
621
.
38152
Edition
22
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK7875
Book number
.
H36
2010eb
OTHER CLASS NUMBERS
Class number
ZN
3750
Class number
ZN
3750
.
System Code
rvk
System Code
rvk
PERSONAL NAME - ALTERNATIVE RESPONSIBILITY
Lindroos, Veikko.
ORIGINATING SOURCE
Date of Transaction
20201203205648.0
Cataloguing Rules (Descriptive Conventions))
pn
ELECTRONIC LOCATION AND ACCESS
Electronic name
مطالعه متن کتاب [Book]
Y
