عنوان

Handbook of silicon wafer cleaning technology /

(Number (ISBN

0815515545

(Number (ISBN

0815517718

(Number (ISBN

0815517734

(Number (ISBN

9780815515548

(Number (ISBN

9780815517719

(Number (ISBN

9780815517733

Number

b718741

Title Proper

Handbook of silicon wafer cleaning technology /

General Material Designation

[Book]

First Statement of Responsibility

edited by Karen A. Reinhardt, Werner Kern.

Edition Statement

2nd ed.

Place of Publication, Distribution, etc.

Norwich, NY :

Name of Publisher, Distributor, etc.

William Andrew,

Date of Publication, Distribution, etc.

©2008.

Specific Material Designation and Extent of Item

1 online resource (xxvi, 718 pages) :

Other Physical Details

illustrations.

Series Title

Materials science & process technology series

Text of Note

Includes bibliographical references and index.

Text of Note

Part 1: Introduction and Overview -- Overview and Evolution of Silicon Wafer Cleaning Technology -- Overview of Wafer Contamination and Defectivity -- Part 2: Wet-Chemical Processes -- Particle Deposition and Adhesion -- Aqueous Cleaning and Surface Conditioning Processes -- Part 3: Dry Cleaning Processes -- Gas-phase Wafer Cleaning Technology -- Plasma Stripping and Cleaning -- Cryogenic Aerosols and Supercritical Fluid Cleaning -- Part 4: Analytical and Control Aspects -- Detection and Measurement of Particulate Contaminants -- Surface Chemical Composition and Morphology -- Ultratrace Impurity and Surface Morphology Analysis -- Analysis and Control of Electrically Active Contaminants -- Part 5: Directions for the Near Future.

0

Text of Note

The second Edition of the Handbook of Silicon Wafer Cleaning Technology is intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. The integration of the clean processes into the device manufacturing flow will be presented with respect to other manufacturing steps such as thermal, implant, etching, and photolithography processes. The Handbook discusses both wet and plasma-based cleaning technologies that are used for removing contamination, particles, residue, and photoresist from wafer surfaces. Both the process and the equipment are covered. A review of the current cleaning technologies is included. Also, advanced cleaning technologies that are under investigation for next generation processing are covered; including supercritical fluid, laser, and cryoaerosol cleaning techniques. Additionally theoretical aspects of the cleaning technologies and how these processes affect the wafer is discussed such as device damage and surface roughening will be discussed. The analysis of the wafers surface is outlined. A discussion of the new materials and the changes required for the surface conditioning process used for manufacturing is also included." Focused on silicon wafer cleaning techniques including wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits." As this book covers the major technologies for removing contaminants, it is a reliable reference for anyone that manufactures integrated circuits, or supplies the semiconductor and microelectronics industries." Covers processes and equipment, as well as new materials and changes required for the surface conditioning process." Editors are two of the top names in the field and are both extensively published." Discusses next generation processing techniques including supercritical fluid, laser, and cryoaerosol.

Source for Acquisition/Subscription Address

Knovel Corporation.

Title

Handbook of silicon wafer cleaning technology.

International Standard Book Number

9780815515548

Silicon-on-insulator technology.

Silicon-on-insulator technology.

TECHNOLOGY & ENGINEERING-- Electronics-- Semiconductors.

TECHNOLOGY & ENGINEERING-- Electronics-- Solid State.

TEC-- 008090

TEC-- 008100

Number

Edition

Class number

Book number

Kern, Werner,1925-

Reinhardt, Karen A.

Date of Transaction

20201208104936.0

Cataloguing Rules (Descriptive Conventions))

pn

Electronic name

[Book]

Y