عنوان
پدید آورنده
موضوع
رده
TK7871.85. G32 2000
TK7871
.
85
.
G32
2000
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
0803126158
(Number (ISBN
9780803126152
NATIONAL BIBLIOGRAPHY NUMBER
Number
b718277
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Gate dielectric integrity :
General Material Designation
[Book]
Other Title Information
material, process, and tool qualification /
First Statement of Responsibility
Dinesh C. Gupta and George A. Brown, editors.
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
West Conshocken, Pa. :
Name of Publisher, Distributor, etc.
ASTM,
Date of Publication, Distribution, etc.
©2000.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xi, 169 pages :
Other Physical Details
illustrations ;
Dimensions
23 cm.
SERIES
Series Title
STP ;
Volume Designation
1382
GENERAL NOTES
Text of Note
Conference on Gate Dielectric Integrity, held Jan. 25, 1999, San Jose, Calif.
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references.
TOPICAL NAME USED AS SUBJECT
Dielectrics-- Testing.
Gate array circuits-- Materials.
Integrated circuits-- Wafer-scale integration-- Reliability.
Semiconductor wafers-- Reliability.
Silicon oxide films-- Testing.
Dielectrics-- Testing.
Gate array circuits-- Materials.
Integrated circuits-- Wafer-scale integration-- Reliability.
Semiconductor wafers-- Reliability.
DEWEY DECIMAL CLASSIFICATION
Number
621
.
3815/2
Edition
21
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK7871
.
85
.
Book number
G32
2000
PERSONAL NAME - ALTERNATIVE RESPONSIBILITY
Brown, George A.,1937-
Gupta, D. C., (Dinesh C.)
CORPORATE BODY NAME - ALTERNATIVE RESPONSIBILITY
Conference on Gate Dielectric Integrity(1999 :, San Jose, Calif.)
ORIGINATING SOURCE
Date of Transaction
20201208102550.0
ELECTRONIC LOCATION AND ACCESS
Electronic name
مطالعه متن کتاب [Book]
Y
