عنوان
پدید آورنده
موضوع
رده
TK7836 .M33 2002
TK7836
.
M33
2002
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
0849308267
(Number (ISBN
9780849308260
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Fundamentals of microfabrication :
General Material Designation
[Book]
Other Title Information
the science of miniaturization /
First Statement of Responsibility
Marc J. Madou.
EDITION STATEMENT
Edition Statement
2nd ed.
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boca Raton :
Name of Publisher, Distributor, etc.
CRC Press,
Date of Publication, Distribution, etc.
©2002.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
723 pages :
Other Physical Details
color illustrations ;
Dimensions
29 cm
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and index.
CONTENTS NOTE
Text of Note
Lithography -- Pattern transfer with dry etching techniques -- Pattern transfer with additive techniques -- Wet bulk micromachining -- Surface micromachining -- LIGA and micromolding -- A comparison of miniaturization techniques : top-down and bottom-up manufacturing -- Modeling, brains, packaging, sample preparation, and substrate choice -- Scaling, actuators, and power in miniaturized systems -- Miniaturization applications -- Appendix A: Metrology techniques for MEMS -- Appendix B: Living book -- Appendix C: Si and SiO₂ etch rates in KOH -- Appendix D: Genetics -- Appendix E: Suggested further reading -- Appendix F: MEMS companies -- Appendix G: Glossary.
0
TOPICAL NAME USED AS SUBJECT
Integrated circuits-- Design and construction.
Lasers-- Industrial applications.
Machining.
Microelectromechanical systems-- Design and construction.
Microelectronic packaging.
Microelectronics.
Circuits intégrés-- Conception et construction
Lasers-- Applications industrielles
Microélectronique
Mise sous boîtier (Microélectronique)
Usinage
Circuit intégré
Encapsulamento eletrônico.
Fertigungstechnik
Integrated circuits-- Design and construction.
Laser (aplicações industriais)
Lasers-- Industrial applications.
LASERS.
Lithografie
Machining.
MACHINING.
Microelectromechanical systems-- Design and construction.
Microelectronic packaging.
Microelectronics.
MICROELECTRONICS.
Microélectronique.
Microeletrônica.
Microfabrication.
MICROFIBERS.
MICROMODULES.
Mikrofertigung
Mikrosystemtechnik
Mise sous boîtier (Électronique)
DEWEY DECIMAL CLASSIFICATION
Number
621
.
3815/2
Edition
21
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK7836
Book number
.
M33
2002
OTHER CLASS NUMBERS
Class number
53
.
55
System Code
bcl
PERSONAL NAME - PRIMARY RESPONSIBILITY
Madou, Marc J.
ORIGINATING SOURCE
Date of Transaction
20200822142044.0
ELECTRONIC LOCATION AND ACCESS
Electronic name
مطالعه متن کتاب [Book]
Y
