IntroductionMicromanufacturing: An Introduction, V.K. Jain, Ajay Sidpara, M. Ravisankar, and Manas DasChallenges in Meso-, Micro-, and Nanomanufacturing, V. RadhakrishnanMicromachiningTraditional MicromachiningMicroturning, R. Balasubramaniam and Vinod Kumar SuriMicrogrinding, P.V. Rao and S. GhoshAdvanced MicromachiningBiomachining-Acidithiobacillus-Genus-Based Metal Removal, Hong Hocheng, Jei-Heui Chang, and Umesh U. JadhavMicro- and Nanomanufacturing by Focused Ion Beam, Vishwas N. Kulkarni, Neeraj Shukla, and Nitul S. RajputNanofinishingMagnetorheological and Allied Finishing Processes, Ajay Sidpara and V.K. JainMagnetic Abrasive Finishing (MAF), D.K. Singh, S.C.Jayswal, and V.K. JainAbrasive Flow Finishing (AFF) for Micromanufacturing, M. Ravisankar, J. Ramkumar, and V.K. JainMicrojoiningLaser Microwelding, N.J. VasaElectron Beams for Macro- and Microwelding Applications, D.K. Pratihar, V. Dey, A.V. Bapat, and K. EaswaramoorthyMicroformingMicro- and Nanostructured Surface Development by Nano Plastic Forming and Roller Imprinting, M. Yoshino, K. Willy, A. Yamanaka, T. Matsumura, S. Aravindan, and P.V. RaoMicroextrusion, U.S. Dixit and R. DasMicrobending with Laser, U.S. Dixit, S.N. Joshi, and V. Hemanth KumarMiscellaneousDimensional Metrology for Micro/Mesoscale Manufacturing, Shawn P. MoylanMicromolding-A Soft Lithography Technique, B. Radha and G.U. KulkarniFabrication of Microelectronic Devices, Monica Katiyar, Deepak, and Vikram VermaAn Integrated Wafer Surface Evolution Model for Chemical Mechanical Planarization (CMP), Abhijit Chandra, Ashraf F. Bastawros, Xiaoping Wang, Pavan Karra, and Micayla HaugenIndex
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Coverage is quite comprehensive ... A useful book ... comprehensive.--A Y C Nee, National University of Singapore.